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Vacuum Pump Control System Boosting Efficiency in Semiconductor Industry: Ultech Engineering’s Outstanding Role at X-Fab
Kenneth Chong, January 15, 2025

In 2024, as part of X-Fab Kuching's building expansion, they added a new Vacuum Pump Control Skid at their new facility. Ultech Engineering supported this initiative by supplying, installing and commissioning three Local Control Panels (LCPs) for the Vacuum Pump Control Skid, and Starter Control Panel (SCP) provided by the main contractor. The scope also included cable laying and termination for the Pump Skid instrument. Additionally, Ultech Engineering provided provisions for end-user monitoring via end-user Distributed Control System (DCS), ensuring seamless integration into their expanded infrastructure.

Introduction of the Vacuum Pump Control System

Vacuum Pump
Credit Image Via Website

A Vacuum Pump Control System regulates the operation of vacuum pumps to maintain desired vacuum levels in a sealed environment. It controls the pump's operation based on pressure readings, ensuring the process runs efficiently and within the required conditions. The system typically includes components like pressure sensors, controllers, valves, and the pump itself, and it can automatically adjust pump speed or operation to optimize energy use and performance. These systems are commonly used in manufacturing, laboratories, and HVAC industries.

Role of Vacuum Pump Control Systems in the Semiconductor Industry

Vacuum Pump
Credit Image Via Website

In the semiconductor manufacturing industry, facilities like X-Fab Kuching, Sarawak specialise in creating chips that enhance people's lives and producing semiconductor devices that contribute to saving lives, connecting people, and enabling cleaner transportation. At X-Fab, it is all about the sleek, round wafers fabricated in cleanrooms across six global production facilities used in a wide range of applications, from consumer and mobile communications, automotive application and medical applications. At the heart of such operations lies the vacuum control system, which is critical in enabling precise and contamination-free manufacturing processes.

At X-Fab Kuching, vacuum pump control systems are indispensable for achieving high precision and reliability in semiconductor production. They ensure that the critical vacuum conditions for processes such as etching, deposition, and implantation are consistently maintained. By enhancing process stability, improving efficiency, and supporting sustainability, these systems are pivotal in enabling companies like X-Fab to deliver semiconductor solutions globally.

Project Overview: X-Fab Vacuum Pump Control System

Vacuum Pump
X-Fab Kuching, Sarawak credit image via website

The X-Fab Vacuum Pump Control System project focuses on supporting the vacuum pump operations at X-Fab’s expanded facility in Kuching, Sarawak. Ultech Engineering began by creating the drawing layouts in November 2023 and started building the panels in April 2024, providing a new integrated control solution to enhance vacuum pump efficiency and reliability.

This project serves the semiconductor manufacturing industry, specifically X-Fab Kuching, known for its precise wafer fabrication processes. To maintain product quality and yield, strict control over parameters like vacuum levels is essential. As part of its facility expansion, X-Fab is installing a new vacuum pump skid on the extended side and Ultech Engineering supported this by supplying, installing, and commissioning three Local Control Panels (LCPs) for the vacuum pump control skid, along with the Starter Control Panel (SCP) provided by the main contractor. The vacuum pump control skid is a modular, pre-assembled unit that combines the vacuum pump, control system, and related components such as piping, valves, and sensors on a single platform, ensuring easier installation and operation.

Ultech Engineering Integrate Local Control Panels with Starter Control Panels for Vacuum Pump Skid

Led by Project Automation Manager Mr. Wang Zhi Xian and Automation and Control Engineer Mr. Mike Gaby Law Ik Pin from Ultech Engineering, this project aims to supply, install, and commission three Local Control Panels, as well as cable laying and termination for all associated instruments that aligns with the end user's control philosophy and serves as the control system for the vacuum pump skid.

The Local Control Panel (LCP) will seamlessly interface with three Starter Control Panels (SCPs) provided by the main contractor, ensuring optimal integration and enhanced control. The three local control panels will be connected or integrated with the three starter control panels in such a way that they can communicate and work together. For instance, the local control panel may have manual controls that send signals to the starter control panels to start or stop the motors, or they could receive feedback from the starter control panels about the motor's status. Additionally, provisions are being made to enable the end user to monitor system performance through their Distributed Control System (DCS).

How does the Vacuum Control Skid Benefit from the Local Control Panel (LCP)?

A vacuum control skid (which combines a vacuum pump, control system and other components like piping, valves and sensors on a single platform) benefits from installing a Local Control Panel because it acts as a control system for the vacuum pump by enabling:

  1. Real-Time Monitoring
  2. Quick Adjustments
  3. Simplified Troubleshooting
  4. Enhanced Safety Through Emergency Controls
  5. Reduced Reliance On Remote Systems
  6. Customizable Functionality For Improved Efficiency And Reliability

Furthermore, in the Local Control Panel (LCP), Ultech Engineering has implemented Siemens' technology to further optimize performance and precision.

Equipment Implemented for Local Control Panel (LCP)

The project leverages Siemens’ CPU 1510SP-1 PN and associated Siemens components such as circuit protection and controller, power supply and SIMATIC modules and accessories. Besides that, in this project, some relays, terminal blocks and other accessories from our brand partner Weidmuller have been used as well. These technologies are pivotal for achieving the automation and precision required in vacuum pump operations.

1. Siemens Cost-Effective Programmable Logic Controller (PLC): CPU 1510SP-1 PN

Features of Siemens CPU 1510SP-1 PN

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The Siemens CPU 1510SP-1 PN is a compact CPU designed specifically for the SIMATIC ET 200SP distributed I/O system. While referred to as a “CPU” in its product name, it functions as a fully capable PLC because it includes all the necessary components for automation such as the processing unit, I/O interfaces, communication interface and memory. It is based on the S7-1500 CPU 1511-1 PN and offers high-performance control for medium-level industrial automation tasks.

The CPU enables high system and machine availability and supports integration with up to 64 IO devices via PROFINET IO. It offers advanced communication options, including PROFINET I-Device, shared I-Device for up to four controllers, and the PROFINET IO IRT interface. Additionally, it includes motion control functionalities for speed control and synchronization, making it versatile for industrial applications.

The CPU 1510SP-1 PN offers high-speed command processing and robust communication capabilities through its integrated PROFINET IO IRT interface. Its motion control functionalities support positioning, speed control, and synchronization, while its trace functions provide real-time diagnostics and error detection. The CPU supports isochronous mode synchronized data processing and program execution. Isochronous mode is a communication method used in digital systems, particularly in networks and control systems, where data is transmitted at regular, time-synchronized intervals. This ensures that operations requiring precise timing, such as real-time applications, maintain consistent performance, minimizing latency and optimizing system reliability.

Security features include password-based know-how protection, copy protection linked to the SIMATIC Memory Card, and a 4-stage authorization concept to prevent unauthorized access.  Integrated system diagnostics in the TIA Portal and web server simplify fault detection and troubleshooting.

Programming with TIA Portal: Siemens State-Of-The-Art Software Solution

Credit Image Via Website

TIA Portal stands for Total Integrated Automation Portal. It is a software suite developed by Siemens for programming and configuring industrial automation systems. The TIA Portal provides a unified environment for working with various Siemens automation hardware, such as PLCs, HMIs and drives, allowing engineers to design, program, and manage the entire automation system from a single platform. Siemens TIA Portal exemplifies modern industrial automation through key aspects:

  1. Digital Workflow: By leveraging digital twins, the TIA Portal allows engineers to stimulate and test machines and systems virtually, reducing development time and minimizing on-site adjustments. With built-in cloud connectivity, it enhances flexibility, enabling remote monitoring, seamless collaboration, and faster interactions for improved product quality.
  2. Integrated Engineering: The TIA Portal integrates all automation components such as controllers, HMIs, drives, and energy management into a unified framework. This consistency streamlines workflows, reduces errors, and accelerates development. The use of reusable libraries and a centralized database further boosts efficiency and ensures project accuracy.
  3. Transparent Operations: Real-time monitoring and advanced analytics provide clear insights into production processes, machine conditions, and energy consumption. This transparency enables data-driven decision-making, helping to optimize performance, improve energy efficiency, and maintain a competitive edge

Together, these features make TIA Portal a cornerstone of efficient, flexible, and data-driven industrial automation. Ultech Engineering is already utilizing the TIA Portal in its operations and continues to push forward in maximizing its potential to enhance daily workflows and achieve greater innovation.

2. Siemens Top-Tier Modular I/O System: SIMATIC ET 200SP

Features of the SIMATIC ET 200SP

Siemens SIMATIC ET 200SP credit image via website

The SIMATIC ET 200SP is a modular and scalable distributed I/O system with IP20 protection. It is designed for compact enclosures and can communicate with SIMATIC controllers via PROFINET IP or PROFIBUS DP. Its compact design, ease of use, and high performance make it ideal for industrial automation. The system offers comprehensive diagnostics with plain text messages for rapid fault identification and resolution.

Credit Image Via Website

The ET 200SP supports up to 64 I/O modules per station, with options for digital, analogue, and speciality I/O. The system allows hot swapping, enabling module replacement without system downtime. Diagnostics are channel-specific and provide clear messages to facilitate maintenance. The compact design maximizes space efficiency, while integrated shielding ensures reliable communication in demanding industrial automation.

Synergy Between Siemens CPU 1510SP-1 PN and SIMATIC ET 200SP Modular I/O System Using PROFINET Communication Protocol

The synergy between Siemens CPU 1510SP-1 PN and SIMATIC ET 200SP provides a robust and scalable solution for X-Fab’s vacuum pump control system, ensuring real-time precision, high availability, and efficient performance. Siemens CPU 1510SP-1 PN acts as the central processing unit, efficiently handling data processing and communication with the SIMATIC ET 200SP’s distributed I/O modules. This integrated approach maximizes the operational efficiency of the vacuum pumps, enhances diagnostic capabilities, and ensures that X-Fab's semiconductor manufacturing process remains uninterrupted and highly reliable.

While it is not strictly required to use the Siemens CPU 1510SP-1 PN and the SIMATIC ET 200SP together, doing so offers a range of benefits that optimize performance, scalability, and reliability, making this combination the ideal choice for controlling vacuum pumps in semiconductor production. The advanced communication via PROFINET, modular scalability, diagnostics, enhanced system security, and motion control features of the integrated system provide a highly efficient and future-proof solution, ensuring operational excellence for X-Fab in the long term.

3. Siemens Top Power Supply: The SITOP PSU100S

Overview of Siemens SITOP PSU100S Power Supply

Credit Image Via Website

A power supply is an essential component of most electronic systems and devices, responsible for converting electrical energy from one form to another. Its primary role is to provide the necessary power for operation while maintaining a stable and reliable voltage to the connected equipment. In simple terms, a power supply takes the input power (either alternating current, AC, or direct current, DC) and converts it to a specific output voltage and current required by the equipment. It can also regulate power to ensure safe operation by protecting against overcurrent, overvoltage, or overheating.

The Siemens SITOP PSU100S is a single-phase power supply designed for industrial applications where reliable 24 V DC power is needed. The SITOP PSU100S is part of Siemens' SITOP (SITOP stands for Siemens Top Power Supply) family of power supplies, which are engineered to provide continuous, stable, and efficient power to critical systems in industries like automation, control, and process industries.

Benefits and Key Features of Siemens SITOP PSU100S Power Supply

Siemens SITOP PSU100S Credit Image Via Website

The Siemens SITOP PSU100S power supply provides several key advantages that directly enhance the X-Fab Vacuum Pump Control System project:

  1. Stable and Reliable 24V Output: Stable and reliable 24V output is crucial for ensuring smooth operations of the Siemens CPU 1510SP-1 PN and other components within the Local Control Panels (LCPs). The low ripple and noise level of just 150 mV Pk-Pk guarantees clean power delivery, reducing the risk of electrical noise interfering with system performance and ensuring the reliable functioning of all connected devices.
  2. Compact and Space-Saving Design: The power supply’s compact dimensions—115mm (W) x 150mm (D) x 145mm (H)—allow for efficient installation on a DIN rail, saving valuable space within the LCPs. A DIN rail is a standardized rail designed for mounting industrial control equipment within racks. It allows components to be clipped on quickly and effortlessly, creating a compact and organized system. This design optimizes panel organization and accessibility, making it easier to maintain and expand the system when necessary.
  3. Adjustable Output Voltage (24-28V): The adjustable output voltage range compensates for potential voltage drops in long cable runs or during high-load situations. This ensures that the connected PLC and control modules consistently receive adequate power, maintaining system stability and performance.
  4. Overload Handling Capability: The power supply can handle brief overloads of up to 1.5 times its rated current, ensuring uninterrupted operation during transient load spikes, such as those encountered during vacuum pump startups. This feature protects the system from disruptions during critical processes.
  5. Compatibility with Redundancy and DC UPS Modules: Its compatibility with redundancy and DC UPS modules boosts system reliability by preventing power interruptions. DC UPS (Direct Current Uninterruptible Power Supply) modules provide continuous power to DC-powered devices during power outages or voltage fluctuations, ensuring operational continuity, protecting sensitive electronics, preventing data loss, and maintaining system stability. This is particularly critical in semiconductor manufacturing, where even brief downtime can result in significant production losses.
  6. Designed for Harsh Industrial Conditions: The power supply is built to operate in a wide temperature range (0°C to +70°C) and in environments with flammable gases or combustible dust. This makes it well-suited for X-Fab’s challenging manufacturing conditions, ensuring safe and reliable performance even in harsh industrial settings.

Updates and Feedback on the Vacuum Pump Control System Project

The Factory Acceptance Testing (FAT) for the X-FAB Vacuum Pump Control Panel ensured system readiness for delivery and installation. Preliminary inspections verified mechanical construction, visual appearance, assembly items, workmanship, and wiring. Grounding tests checked earth bonding and instrument ground continuity to prevent faults. During system testing, power-on verification, push button and switch functionality, and PLC operations were validated. Functionality tests on three panels covered start, stop, fault, and alarm sequences, along with Modbus communication checks.

Finally, shock tests and system restart tests ensured operational stability. The project completed the Factory Acceptance Testing on 6th August 2024, which the client was satisfied with, and the Local Control Panels have been delivered to Kuching. However, site installation is pending as the facility is not yet ready for equipment installation. Once the site is prepared, the panels will undergo Site Acceptance Testing (SAT) and commissioning.

Mr. Mike Gaby Law Ik Pin, one of Ultech Engineering's Automation Engineers involved in the X-Fab project, stated that there have been no challenges up to the phase of Factory Acceptance Testing. However, challenges may arise during the commissioning phase.

Client Benefits After Implementing New Solutions Provided by Ultech Engineering

After implementing the new solutions provided by Ultech Engineering, X-Fab will experience several significant benefits.

  1. Enhanced Operational Efficiency: The vacuum pump control system will enhance operational efficiency by providing precise control over vacuum pumps, ensuring consistent vacuum levels essential for semiconductor manufacturing. This precision will improve production processes and reduce variability. Additionally, the system's advanced monitoring and control features will minimize downtime by enabling faster detection and resolution of system issues. The real-time communication capabilities of Siemens' CPU 1510SP-1 PN will further improve responsiveness, allowing prompt adjustments to any deviations in operating parameters.
  2. Higher System Availability: X-Fab can expect higher system availability and uninterrupted vacuum pump operation by leveraging Siemens technology, which includes built-in fault-tolerance features. The modular design of the SIMATIC ET 200SP ensures that the system can easily adapt to future expansions, providing long-term reliability and scalability.
  3. Comprehensive Monitoring and Diagnostics: The system will enable comprehensive monitoring and diagnostics, simplifying maintenance and improving reliability. Real-time diagnostics through the TIA Portal, combined with channel-specific fault detection, will make troubleshooting easier and reduce the time required for maintenance. This capability ensures that any issues can be quickly identified and resolved, keeping the system operational with minimal disruptions.
  4. Cost Savings: The system’s hot-swapping capability allows module replacement without halting operations, reducing maintenance costs. Furthermore, optimized control and monitoring will lower energy consumption, resulting in reduced operational costs.
  5. Improved Production Quality and Yield: The precise and synchronized operation of the vacuum pumps will lead to stable vacuum levels, minimizing defects and enhancing the quality of semiconductor products. Automation will further improve production consistency by reducing the likelihood of human error and lowering the risk of contamination. This will result in higher production quality and yield.
  6. Scalability and Future-Proof Design: The system’s modular design and future-proof architecture will allow X-Fab to expand or upgrade its operations easily. Siemens components ensure seamless integration of additional vacuum pump skids or advanced features, supporting the company’s growth and evolving requirements.
  7. Enhanced Operator Experience: Ultech Engineering will enhance the operator experience by providing user-friendly Local Control Panels, simplifying system management and reducing operator workload. Comprehensive training and post-installation support will ensure that X-Fab’s staff are well-equipped to operate and maintain the system effectively.

Ultech Engineering’s Vacuum Pump Control System: Advancing X-Fab's Operational Excellence

The X-Fab Vacuum Pump Control System project exemplifies Ultech Engineering’s dedication to delivering innovative, high-performance automation solutions. By leveraging Siemens’ technology and aligning the system’s design with X-Fab's operational objectives, the project is poised to enhance production efficiency, reliability, and scalability. As the site nears readiness, the successful deployment of this system will mark a pivotal milestone for Ultech Engineering and X-Fab's ongoing pursuit of operational excellence and industry leadership.

This collaboration highlights how modern automation technologies can drive efficiency and precision in semiconductor manufacturing. By implementing Siemens' advanced CPU 1510SP-1 PN, SIMATIC ET 200SP, and SITOP PSU100S, the project delivers a state-of-the-art control solution that enhances operational reliability, minimizes downtime, and optimizes production processes. As the project moves toward its commissioning phase, Ultech Engineering continues to demonstrate its expertise in delivering tailored solutions that meet the exacting demands of the semiconductor industry.

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